เครื่องเคลือบไลน์อินไลน์แบบปลายเดี่ยว PVD

FHR FHR.Line2500.H

Generally, the FHR.Line sputtering machines are systems for the deposition of metals, alloys or compound
layers, preferably on planar substrates on carriers. The systems can be configured according to the
requirements of the customer and are able to run in DC-, MF- and RF-mode as well as for metallic or reactive
layer deposition. Due to the modular design principle, different deposition technologies can be combined.
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Substrate size 2500x1000mm