ห้องระบายแก๊สแบบถาด LC

GMC LC-tray degassing cham

LC tray degassing chamber

2. Degassing chamber:
1. Vacuum profile;
1.1. Pressure set points adjustable between 1.103 and 1.10-3mBar
1.1.1. Measurement range: 1.103 – 5.10-4
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1.2. Time set points adjustable between 1 and 600min per step
1.2.1. Degassing step (D) can be minutes to days
1.3. Evacuation and ventilation rates must be controllable
1.4. The evacuation cycle (A – D) is performed automatically
1.4.1. The vent step (E) must be activated manually (operator)
1.5. Typical degassing profile

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