ไมโครแมชชีน, การอะเบลชั่น ITO, โครงสร้างจุลภาค

Pulsar Photonics RDX 500

This ultrashort-pulse laser processing station (Pulsar Photonics RDX 500) is currently in operation. It ist used for ablation/patterning of transparent conductive coatings (e.g., ITO) and for precision glass cutting. A system demonstration can be arranged upon request.

In its current configuration with an 532 nm (green) laser, the machine is also suitable for applications in the field of microstructuring and micromachining. Our partners can develop the specific parameters for your usecase.

Scope of Delivery
The exact scope of delivery will be confirmed in writing prior to sale. Subject to change.
Laser system Pulsar Photonics RDX 500 (base machine)
Laser source EdgeWave PX25-2
Control PC with software
2D galvanometer scanner unit with Newson Scanner Controller A2G_CUA01 incl. F-Theta objective
PULSAR PHOTONICS CAMERA MODULE CM-R1 for workpiece positioning
Camera-based measurement function (for position and reference measurement)
1 tool parameter set for ITO thin-film ablation
1 tool parameter set for glass cutting
Additional tool parameter sets can be developed on request
Extraction device for ablation particles
Vacuum chuck with vacuum pump for fixing flat samples
CAM software: Rhinoceros 5.0 incl. PhotonicVectors plugin (licence)
Documentation/Manual
Nameplate present
Accessories as agreed
Documentation package

Key Technical Data
Laser Type Ultra-short pulse laser (USP / Picosecond)
Pulse Duration 10 ps
Wavelength 532 nm
Average Power < 20 W
Repetition Rate 100 kHz – 20 MHz
Laser Serial Number SN0702
Kodox Uzwgepfx An Iolu
Machine Serial Number RDX-500-071501
Processing Axes 2.5 axes (X/Y processing + Z-axis for focus/depth adjustment)
Scanner Unit 2D galvanometer scanner with Newson Scanner Controller A2G_CUA01 incl. F-Theta objective
Processing Area Min. 210 mm x 290 mm (exact dimensions to be specified)
Control Software Windows 7 with Photonic Elements (scanner, camera, laser, axes control; CAD-CAM import, live view) and Rhinoceros 5.0 incl. PhotonicVectors plugin for job preparation
CAM Software Rhinoceros 5.0 incl. PhotonicVectors Plugin
Voltage / Electrical Power 400 V, 5.8 kW
Dimensions (L×W×H) 1,500 × 1,200 × 1,850 mm
Weight approx. 750 kg
Laser Safety Class Laser Safety Class 1